Inquiry (采购产品): gas analysis of CVD process stream Pressure: 0.5 inwc (above atm) Temp: 250-450F Comprised in roughly equal parts of - methyldichlorosilane (vaporized at that temp, but liquid at room temp) - propylene (aka propene) - Hydrogen Also CO2, Ar, and HCL vapor. The stream is supposed to be free of O2 and H20, but in order to get that we have N2/H2 purge sequences. Online mass spec on the exhaust stream would help to 'fingerprint' the process, and also find out whether our purges our adequate. What online gas analyzer would you recommend for most economical solution? **** Hidden Message ***** Matt Weleski 48642 USA Company: Evergreen Solar Inc E-mail: mweleski@evergreensolar.com **** Hidden Message ***** mweleski@evergreensolar.com
