Inquiry (采购产品): Step file for valve Please send me a step file for SM930 AOP valve 54013669. I believe it was developed for Lam Research. We are going start integrating it into there standard product...Thank you. **** Hidden Message ***** Andrew Thomas CA 95035 USA Company: Celerity Inc. E-mail: athomas@celerity.net **** Hidden Message ***** athomas@celerity.net