Inquiry (采购产品): Toxic Gas Handling We are planning to install a vacuum chamber with several toxic gas feeds. I am interested to know if you can do "hardware installation" for all toxic gas lines into the vacuum system (chemical vapor depsoition) and to connect exhaust lines to building exhaust and test for their safety. Please quote me the price of items (such as gases, sensors, and installation charges.) Gases: Silane (SH4), Phosphene (PH3) Concentrations: 100% Purity level: electronic grade (99.999%) Some time these gases are diluted with Ar or He to 2% Volume: 500grams Application: Flow from cylinder to a vacuum chamber (chemical vapor deposition) Flow rate: 50-100 CC/min (regulator may be needed) Our requirement: Complete plumbing from cylinder to vacuum system And plumbing from system to exhaust Installing toxic gas monitors and interlocks in place Venkateswara Bommisetty Center for Accelerated Applications at the Nanoscale Harding Hall 301 Box 2220 South Dakota State University Brookings SD 57006 Phone: 605-688-5230 **** Hidden Message ***** Venkat Bommisetty 57007 Company: SDSU E-mail: venkat.bommisetty@sdstate.edu **** Hidden Message ***** venkat.bommisetty@sdstate.edu
