Inquiry (采购产品): looking for a phosphor trap in the foreline We habe aproblem with dry pump . This pump is integrated in a special implanter with low Phosphine , Arsin and diboran flow at about 1-3 sccm . Concentration is 100%. What is your recommendation here and have you experiance with this type of prcess. very critical is delta P. almost no pressure drop. **** Hidden Message ***** Horst Jung 85622 Feldkirch Company: metron E-mail: horst.jung@metrontech.com **** Hidden Message ***** horst.jung@metrontech.com
